Cleanroom-to-Cleanroom Delivery with Controlled Vibration and Contamination
Reliable Transportation and Installation of Precision Equipment through Dedicated Containers and Strict Handling Procedures
Customer：Semiconductor Manufacturing Equipment Manufacturer
Challenge (Before)
In a project involving the delivery and installation of semiconductor manufacturing equipment highly sensitive to micro-vibration and contamination, installation inside a cleanroom environment with strict cleanliness requirements was required. If physical shocks or dust were generated during transportation or installation, not only could the equipment’s quality be affected, but the cleanroom environment could also become contaminated, requiring re-cleaning and potentially causing significant delays to the production schedule. For this reason, extremely careful handling was required throughout the transportation and installation process.
Solutions
NX Solution
- In accordance with the customer’s SOP, dedicated containers equipped with temperature control were used. Container condition checks and start-up tests of the temperature control system were conducted prior to departure.
- To avoid vertical vibration during transportation, the dedicated containers were loaded directly onto cargo aircraft, eliminating intermediate storage and palletizing processes.
- During delivery into the cleanroom, strict procedures were followed to prevent dust and contamination, ensuring the equipment was transported to its installation location while maintaining the required cleanliness level.
Benefits
Benefits (Results)
By managing the entire process from transportation through installation, Nippon Express successfully completed the delivery while maintaining the cleanroom environment. As a result, the customer was able to launch its new production line on schedule and begin operations.
